Sensirion's high-precision flow sensors combine a precision sensor element with signal processing on a single chip

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Sensirion's high-precision flow sensors combine a precision sensor element with signal processing on a single chip

February 25 , 2023 0

The heart of SFC6000D and SFM6000D products is the unsurpassed Sensirion CMOSens technology. It combines a high-precision sensor element with state-of-the-art signal processing on a single chip, thereby providing an accurately calibrated and temperature-compensated signal.

Thanks to this sensor technology, Sensirion's flow meters and controllers achieve unmatched ratings for speed, Thanks to this sensor technology, sensirion's flow meters and controllers achieve unmatched ratings for speed, accuracy, and repeatability at very attractive system cost. Due to the excellent long-term stability of CMOSens chips, no recalibration is required.

The SFC6000D offers ultra-fast settling time and high control range. SFC6000D and SFM6000D are factory calibrated for multiple gases, and they offer high flexibility regarding mechanical connectors, which can be exchanged with off-the-shelf components.

The high performance and low cost of SFC6000D and SFM6000D make them the best choice for a wide range of applications, such as gas flushing, FOUP, analytical instrumentation, coating and medical equipment, process automation, and gas mixing, to name a few.

Features

● Disruptive concept combining plastic body and highly integrated electronics
● Small form factor and low weight
● High accuracy/repeatability (2%/0.2% of set point)
● Wide control range (500:1)
● Ultra-fast settling time (100 ms)

● RS485 and I²C digital interface
● Exchangeable 6 mm push-in and downmount connectors
● NIST traceable calibration
● No drift and no recalibration required in the field